Publications

2 results for M.A. Quevedo-Lopez

Mobility and charge trapping comparison for crystalline and amorphous HfON and HfSiON gate dielectrics
- - P.D. Kirsch
  - M.A. Quevedo-Lopez
  - et al.
- 2006
- Applied Physics Letters
High performance gate first HfSiON dielectric satisfying 45nm node requirements
- - M.A. Quevedo-Lopez
  - S. Krishnan
  - et al.
- 2005
- IEDM 2005