Publications

2 results for Kevin Cummings

A year in the life of an immersion lithography alpha tool at albany NanoTech
- - Michael Tittnich
  - John Hartley
  - et al.
- 2006
- SPIE Advanced Lithography 2006
Predicting in-plane distortion from electron-beam lithography on x-ray mask membranes
- - D.L. Laird
  - R. Engelstad
  - et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures