Publications

3 results for Uzo Okoroanyanwu

Initial experience establishing a EUV baseline lithography process for manufacturability assessment
- - O.R. Wood II
  - D. Back
  - et al.
- 2007
- SPIE Advanced Lithography 2007
A year in the life of an immersion lithography alpha tool at albany NanoTech
- - Michael Tittnich
  - John Hartley
  - et al.
- 2006
- SPIE Advanced Lithography 2006
Progress in 193 nm positive resists
- - R.D. Allen
  - R. Soortyakumaran
  - et al.
- 1996
- J. Photopolym. Sci. Tech.