Publications

3 results for E. Rottenkolber

CD optimization methodology for extending optical lithography
- - C. Wong
  - G. Seevaratnam
  - et al.
- 2013
- SPIE Advanced Lithography 2013
Advanced overlay control in volume manufacturing
- - Timothy Wiltshire
  - Christopher Ausschnitt
  - et al.
- 2011
- ASMC 2011
Synthesis and control of ultra thin gate oxides for the 90 and 65 NM nodes
- - Joseph F. Shepard Jr.
  - Anthony Chou
  - et al.
- 2005
- RTP 2005