Publications

2 results for Kourosh Nafisi

Predicting and reducing substrate induced focus error
- - Bernhard Liegl
  - Brian Sapp
  - et al.
- 2010
- SPIE Advanced Lithography 2010
Predicting substrate-induced focus error
- - Bernhard Liegl
  - Brian Sapp
  - et al.
- 2010
- Journal of Micro/Nanolithography, MEMS, and MOEMS