Publications

4 results for Bernhard Liegl

Predicting and reducing substrate induced focus error
- - Bernhard Liegl
  - Brian Sapp
  - et al.
- 2010
- SPIE Advanced Lithography 2010
Predicting substrate-induced focus error
- - Bernhard Liegl
  - Brian Sapp
  - et al.
- 2010
- Journal of Micro/Nanolithography, MEMS, and MOEMS
Measuring layer-specific depth-of-focus requirements
- - Bernhard Liegl
  - Allen Gabor
  - et al.
- 2008
- SPIE Advanced Lithography 2008
Challenges of Aluminum RIE Technology at sub 0.45 μm Pitches
- - R. Ravikumar
  - R. Filippi
  - et al.
- 1999
- IITC 1999