Publications

2 results for Stanislav Stepanov

Simultaneous measurement of optical properties and geometry of resist using multiple scatterometry gratings
- - Alok Vaid
  - Matthew Sendelbach
  - et al.
- 2010
- SPIE Advanced Lithography 2010
Simultaneous measurement of optical properties and geometry of resist using multiple scatterometry targets
- - Alok Vaid
  - Matthew Sendelbach
  - et al.
- 2010
- Journal of Micro/Nanolithography, MEMS, and MOEMS