Generation of 193-nm femtosecond light pulses and their application to photomask repair
- D. Lim
- R. Haight
- 2007
- Journal of the Korean Physical Society
Publications
7 results for D. Lim
Role of oxygen vacancies in VFB/Vt stability of pFET metals on HfO2
- E. Cartier
- F.R. McFeely
- et al.
- 2005
- VLSI Technology 2005
In situ photovoltage measurements using femtosecond pump-probe photoelectron spectroscopy and its application to metal-HfO 2-Si structures
- Daeyoung Lim
- Richard Haight
- 2005
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Oxygen defects and Fermi level location in metal-hafnium oxide-silicon structures
- Daeyoung Lim
- Richard Haight
- et al.
- 2005
- Applied Physics Letters
Femtosecond laser ablation and deposition of metal films on transparent substrates with applications in photomask repair
- Richard Haight
- Alfred Wagner
- et al.
- 2005
- Lasers and Applications in Science and Engineering 2005
Temperature dependent defect formation and charging in hafnium oxides and silicates
- D. Lim
- R. Haight
- 2005
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
High resolution material ablation and deposition with femtosecond lasers and applications to photomask repair
- Richard Haight
- Alfred Wagner
- et al.
- 2004
- Journal of Modern Optics