Publications

4 results for P.R. Varekamp

Thickness measurement of ultra-thin gate dielectrics under inversion condition
- - W. Zhu
  - Mukesh Khare
  - et al.
- 2001
- International Symposium on VLSI Technology, Systems, and Applications, Proceedings
Paper
Breakdown measurements of ultra-thin SiO₂ at low voltage
- - J.H. Stathis
  - A. Vayshenker
  - et al.
- 2000
- VLSI Technology 2000
Conference paper
Sub-60 nm physical gate length SOI CMOS
- - I.Y. Yang
  - K. Chen
  - et al.
- 1999
- IEDM 1999
Conference paper
Nucleation of chemical vapor deposited silicon nitride on silicon dioxide
- - M. Copel
  - P.R. Varekamp
  - et al.
- 1999
- Applied Physics Letters
Paper