Publications

2 results for J.-T. Sucharitaves

A multilevel copper/low-k/airgap BEOL technology
- - S.V. Nitta
  - S. Ponoth
  - et al.
- 2007
- ADMETA 2007
A 45 nm CMOS node Cu/low-k/ ULtra low-k PECVD SiCOH (k=2.4) BEOL technology
- - S. Sankaran
  - S. Arai
  - et al.
- 2006
- IEDM 2006