Dependence of polymer surface roughening rate on deposited energy density during plasma processing
- Sebastian Engelmann
- Robert L. Bruce
- et al.
- 2009
- Plasma Processes and Polymers
Publications
7 results for Eric A. Hudson
Dependence of photoresist surface modifications during plasma-based pattern transfer on choice of feedgas composition: Comparison of C4 F 8 - And CF4 -based discharges
- S. Engelmann
- R. Bruce
- et al.
- 2009
- Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Studies of fluorocarbon film deposition and its correlation with etched trench sidewall angle by employing a gap structure using C4F 8Ar and CF4/H2 based capacitively coupled plasmas
- Li Ling
- X. Hua
- et al.
- 2008
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
First experimental results from IBM/TENN/TULANE/LLNL/LBL undulator beamline at the advanced light source
- J.J. Jia
- T.A. Callcott
- et al.
- 1995
- Review of Scientific Instruments
Probing the graphite band structure with resonant soft-x-ray fluorescence
- J.A. Carlisle
- Eric L. Shirley
- et al.
- 1995
- Physical Review Letters
Characterization of buried thin films with resonant soft x-ray fluorescence <AUTHGRP>
- J.A. Carlisle
- L.J. Terminello
- et al.
- 1994
- Applied Physics Letters
Occupied and unoccupied orbitals of c60 and c70
- J.A. Carlisle
- L.J. Terminello
- et al.
- 1994
- Molecular Crystals and Liquid Crystals Science and Technology. Section A. Molecular Crystals and Liquid Crystals