Publications

3 results for Atsunobu Isobayashi

A Unified TDDB Model for BEOL Dielectrics of Various Structures and Thick FEOL Dielectrics
- - Kenji Okada
  - Kei Date
  - et al.
- 2024
- IEEE Transactions on Electron Devices
Ionized-PVD stacked barrier structure of TaN/TaRu for 32nm BEOL integration
- - Takeshi Nogami
  - Chih-Chao Yang
  - et al.
- 2008
- ADMETA 2008
Robust and low cost copper contact application for low power device at 32 nm-node and beyond
- - Atsunobu Isobayashi
  - James J. Kelly
  - et al.
- 2009
- IITC 2009