Publications

2 results for Nancy Zhou

Evaluation of easily removable pellicle adhesive
- - Nancy Zhou
  - Monica Barrett
  - et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
Evaluation of 32nm Advanced immersion lithography pellicles
- - N. Zhou
  - K. Racette
  - et al.
- 2008
- SPIE Photomask Technology + EUV Lithography 2008