Publications

2 results for Taiichi Furukawa

Investigation of pattern wiggling for spin-on organic hardmask materials
- - Goji Wakamatsu
  - Kentaro Goto
  - et al.
- 2012
- Proceedings of SPIE - The International Society for Optical Engineering 2012
Characterization of vinyl ether UV-cure nanoimprint resist
- - Taiichi Furukawa
  - Frances A. Houle
  - et al.
- 2009
- SPIE Advanced Lithography 2009