Publications

2 results for Kaigham J. Gabriel

Design, fabrication, and operation of submicron gap comb-drive microactuators
- - Toshiki Hirano
  - Tomotake Furuhata
  - et al.
- 1992
- JMEMS
Sub-micron gaps without sub-micron etching
- - T. Furuhata
  - T. Hirano
  - et al.
- 1991
- MEMS 1991