Publications

5 results for R. Knarr

Characterization of novel TiN/HfO₂ metal insulator semiconductor stack for 32nm eDRAM
- - Puneet Goyal
  - Sneha Gupta
  - et al.
- 2010
- IEEE International SOI Conference 2010
Conference paper
Gate length scaling and high drive currents enabled for high performance SOI technology using high-κ/metal gate
- - K. Henson
  - H. Bu
  - et al.
- 2008
- IEDM 2008
Conference paper
Implementation of robust nickel alloy salicide process for high-performance 65nm SOI CMOS manufacturing
- - Jay Strane
  - David Brown
  - et al.
- 2007
- VLSI-TSA 2007
Conference paper
Lower resistance scaled metal contacts to silicide for advanced CMOS
- - A. Topol
  - C. Sheraw
  - et al.
- 2006
- VLSI Technology 2006
Conference paper
Integrated electro-chemical mechanical planarization (Ecmp) for future generation device technology
- - L. Economikos
  - X. Wang
  - et al.
- 2004
- IITC 2004
Conference paper