Publications

3 results for Valli Arunachalam

Low resistivity tungsten for 32 nm node MOL contacts and beyond
- - Filippos Papadatos
  - Keith Wong
  - et al.
- 2012
- Microelectronic Engineering
Comparative study of CVD TiN vs. ALD TiN for contact metallization in 32nm node and beyond
- - Valli Arunachalam
  - Filippos Papadatos
  - et al.
- 2010
- ADMETA 2010
Advanced metallization developments for 32-nm node CMOS technology contact architecture
- - Doug H. Lee
  - Valli Arunachalam
  - et al.
- 2009
- ADMETA 2009