Publications

2 results for Ilya Osherov

Scatterometry-informed machine learning study to determine bi-directional intercorrelation of adjacent patterning steps
- - Padraig Timoney
  - Stefan Schoeche
  - et al.
- 2025
- SPIE Advanced Lithography + Patterning 2025
Spectral Interferometry for TSV Metrology in Chiplet Technology
- - Stefan Schoeche
  - Daniel Schmidt
  - et al.
- 2024
- SPIE Advanced Lithography + Patterning 2024