Publications

3 results for Katherine Sieg

From Lab to Fab - In-line SIMS for Process Control in Nanosheet Gate-All-Around Device Manufacturing
- - Stefan Schoeche
  - Katherine Sieg
  - et al.
- 2024
- SPIE Advanced Lithography + Patterning 2024
Large Feature Wafer Level In-Line Optical Metrology Techniques for Advanced Packaging Schemes
- - Katherine Sieg
  - Chris Bottoms
  - et al.
- 2024
- SPIE Advanced Lithography + Patterning 2024
Spectral Interferometry for TSV Metrology in Chiplet Technology
- - Stefan Schoeche
  - Daniel Schmidt
  - et al.
- 2024
- SPIE Advanced Lithography + Patterning 2024