3 results for
Wolfgang Jacob- Paul B. Comita
- Eric Kay
- et al.
- 1994
- Applied Surface Science
Paper
- William R. Creasy
- Jeffrey A. Zimmerman
- et al.
- 1992
- Journal of Applied Physics
Paper
- P.B. Comita
- W. Jacob
- et al.
- 1992
- SPIE Microelectronic Processing Integration 1992
Conference paper