Publications

3 results for T.P. Sauer

Alkylated poly(4-hydroxystyrene) derivatives for deep ultraviolet lithography
- - D.R. McKean
  - W.D. Hinsberg
  - et al.
- 1992
- J. Photopolym. Sci. Tech.
Synthesis, characterization, and lithographic behavior of methylated poly(4-hydroxystyrene)
- - D.R. McKean
  - T.P. Sauer
  - et al.
- 1990
- ACS Division of Polymer Chemistry Washington DC Meeting 1990
Modified polyhydroxystyrenes as matrix resins for dissolution inhibition type photoresists
- - G. Pawlowski
  - T.P. Sauer
  - et al.
- 1990
- Microlithography 1990