Publications

2 results for P.W. Li

SiGe pMOSFET's with Gate Oxide Fabricated by Microwave Electron Cyclotron Resonance Plasma Processing
- - P.W. Li
  - E.S. Yang
  - et al.
- 1994
- IEEE Electron Device Letters
Paper
Formation of stoichiometric SiGe oxide by electron cyclotron resonance plasma
- - P.W. Li
  - H.K. Liou
  - et al.
- 1992
- Applied Physics Letters
Paper