Publications

2 results for D.N. Ruzic

Thin, high atomic weight refractory film deposition for diffusion barrier, adhesion layer, and seed layer applications
- - S.M. Rossnagel
  - C. Nichols
  - et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
The effects of substrate potentials on electron cyclotron resonance plasmas
- - S.M. Rossnagel
  - S.J. Whitehair
  - et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films