Publications

8 results for Winfrid Ziemlich

"Laser cleaning" removes particles from surfaces
- - W. Zapka
  - Winfrid Ziemlich
  - et al.
- 1993
- Microelectronic Engineering
Laser cleaning: Laser‐induced removal of particles from surfaces
- - W. Zapka
  - Winfrid Ziemlich
  - et al.
- 1993
- Advanced Materials for Optics and Electronics
Laser-cleaning techniques for removal of surface particulates
- - Andrew C. Tam
  - Wing P. Leung
  - et al.
- 1992
- Journal of Applied Physics
Liquid film enhanced laser cleaning
- - W. Zapka
  - A.C. Tam
  - et al.
- 1992
- Microelectronic Engineering
Efficient pulsed laser removal of 0.2 μm sized particles from a solid surface
- - W. Zapka
  - Winfrid Ziemlich
  - et al.
- 1991
- Applied Physics Letters
Efficient laser cleaning of small particulates using pulsed laser irradiation synchronized with liquid-film deposition
- - A.C. Tam
  - W. Zapka
  - et al.
- 1991
- SPIE Microelectronic Processing Integration 1991
The electron beam proximity printing lithography, a candidate for the 0.35 and 0.25 micron chip generations
- - U. Behringer
  - W. Haug
  - et al.
- 1991
- Microelectronic Engineering
Laser cleaning of wafer surfaces and lithography masks
- - W. Zapka
  - A.C. Tam
  - et al.
- 1991
- Microelectronic Engineering