Sensitive resist systems based on acid‐catalyzed polymer reactions
- Hiroshi Ito
- William P. England
- et al.
- 2011
- Makromolekulare Chemie. Macromolecular Symposia
Paper
Publications
7 results for William P. England
Thermal and Acid-Catalyzed Deesterification and Rearrangement of Poly(2-cyclopropyl-2-propyl 4-vinylbenzoate) and Their Application to Lithographic Imaging
- Hiroshi Ito
- William P. England
- et al.
- 2002
- Macromolecules
PaperMolecular design for stabilization of chemical amplification resist toward airborne contamination
- Hiroshi Ito
- William P. England
- et al.
- 1993
- Microlithography 1993
Conference paperApproach toward environmental stabilization of chemical amplification resists
- Hiroshi Ito
- William P. England
- et al.
- 1993
- J. Photopolym. Sci. Tech.
PaperEffects of polymer end groups on chemical amplification
- Hiroshi Ito
- William P. England
- et al.
- 1992
- Microlithography 1992
Conference paperAcid-catalyzed depolymerization of poly(α-methylstyrene) derivatives
- Hiroshi Ito
- William P. England
- 1989
- ACS National Meeting 1989
Conference paperAcid-catalyzed deprotection and rearrangement in resist design
- Hiroshi Ito
- Mitsuru Ueda
- et al.
- 1989
- ACS PMSE 1989
Conference paper