An x-ray spectromicroscopic study of the local structure of patterned titanium suicide
- S. Singh
- H. Solak
- et al.
- 1997
- Applied Physics Letters
Publications
4 results for F. Cerrina
Simulation of X-ray mask defect printability
- B.S. Bollepalli
- Scott D. Hector
- et al.
- 1997
- Microlithography 1997
X-ray lithography for ≤100 nm ground rules in complex patterns
- Scott Hector
- Victor Pol
- et al.
- 1997
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Thermoelastic effects in x-ray lithography masks during synchrotron storage ring irradiation
- Y. Vladimirsky
- J.R. Maldonado
- et al.
- 1990
- Microelectronic Engineering