Tantalum plasma etching with minimum effect on underlying nickel-iron thin film
- R. Hsiao
- D.C. Miller
- et al.
- 1997
- Thin Solid Films
Publications
14 results for Neil L. Robertson
Writing Performance of Narrow Gap Heads Made with Sputtered Laminated FeN Materials on 3800 Oe Coercivity Media
- C. Jahnes
- L. Vo
- et al.
- 1994
- IEEE Transactions on Magnetics
Electrolytic Codeposition of Ni-γAl2O3 Thin Films
- Patrick R. Webb
- Neil L. Robertson
- 1994
- JES
Batch-fabricated milli-actuators
- L.-S. Fan
- L.H. Lane
- et al.
- 1993
- MEMS 1993