Studies of the reactive ion etching of SiGe alloys
- G.S. Oehriein
- G.M.W. Kroesen
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
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12 results for E. De Frésart
Low-temperature silicon cleaning via hydrogen passivation and conditions for epitaxy
- Subramanian S. Iyer
- M. Arienzo
- et al.
- 1990
- Applied Physics Letters