Publications

2 results for John Costable

High rate radio frequency sputtering using in-phase plasma confinement
- - James E. Lucy
  - John Costable
  - et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Radio frequency sputter deposition of si02 films at high rate
- - J.S. Logar
  - F. Jones
  - et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films