Publications

12 results for S.R. Kasi

HF surface passivation failure in integrated thermal oxidation processing
- - M. Liehr
  - M. Offenberg
  - et al.
- 1990
- SSDM 1990
Equilibrium surface hydrogen coverage during silicon epitaxy using SiH₄
- - C.M. Greenlief
  - M. Offenberg
  - et al.
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films