Publications

2 results for G. Fortuño-Wiltshire

Hollow Cathode Etching of Si and SiO₂ Using CF₄ and H₂
- - G. Fortuño-Wiltshire
  - G.S. Oehrlein
- 2019
- JES
X-ray photoemission and Raman scattering spectroscopic study of surface modifications of silicon induced by electron cyclotron resonance etching
- - A.S. Yapsir
  - G.S. Oehrlein
  - et al.
- 1990
- Applied Physics Letters