Publications

3 results for J. Singh

Role of the chamber wall in low-pressure high-density etching plasmas
- - James A. O'Neill
  - Jyothi Singh
- 1995
- Journal of Applied Physics
Paper
Ultraviolet absorption spectroscopy for the detection of CF₂ in high-density plasmas
- - James A. O'Neill
  - Jyothi Singh
- 1994
- Journal of Applied Physics
Paper
In situ laser diagnostic studies of plasma-generated particulate contamination
- - G.S. Selwyn
  - J. Singh
  - et al.
- 1989
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper