Lateral dopant profiling on a 100 nm scale by scanning capacitance microscopyC.C. WilliamsJ. Slinkmanet al.1990Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Lateral dopant profiling with 200 nm resolution by scanning capacitance microscopyC.C. WilliamsJ. Slinkmanet al.1989Applied Physics Letters
Scanning capacitance microscopy on a 25 nm scaleC.C. WilliamsW.P. Houghet al.1989Applied Physics Letters