Electrically neutral nitrogen dangling-bond defects in amorphous hydrogenated silicon nitride thin films
- W.L. Warren
- P. Lenahan
- et al.
- 1991
- Journal of Applied Physics
Publications
13 results for W.L. Warren
Microscopic origin of the light-induced defects in hydrogenated nitrogen-rich amorphous silicon nitride films
- Jerzy Kanicki
- W.L. Warren
- et al.
- 1991
- Journal of Non-Crystalline Solids
Neutral E' centers in microwave downstream plasma-enhanced chemical-vapor-deposited silicon dioxide
- W.L. Warren
- P. Lenahan
- et al.
- 1988
- Applied Physics Letters