0.22 μm CMOS-SOI technology with a Cu BEOL
- A. Ajmera
- J. Sleight
- et al.
- 1999
- VLSI Technology 1999
Conference paper
Publications
3 results for J.B. Lasky
A High-Density 6.9 sq. pm Embedded SRAM Cell in a High-Performance 0.25 μm-Generation CMOS Logic Technology
- S. Subbanna
- P. Agnello
- et al.
- 1996
- IEDM 1996
Conference paperTransient boron diffusion in ion-implanted crystalline and amorphous silicon
- T.O. Sedgwick
- Alwin E. Michel
- et al.
- 1988
- Journal of Applied Physics
Paper