Publications

2 results for G.S. Scilla

Electrical properties of vacuum annealed Si surfaces
- - J. Werner
  - M. Renier
  - et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Dopant redistribution at Si surfaces during vacuum anneal
- - M. Liehr
  - M. Renier
  - et al.
- 1987
- Journal of Applied Physics