Low thermal budget processing for sequential 3-D IC fabrication
- Bipin Rajendran
- Rohit S. Shenoy
- et al.
- 2007
- IEEE Transactions on Electron Devices
Publications
10 results for R.F. Pease
CMOS transistor processing compatible with monolithic 3-D integration
- B. Rajendran
- R.S. Shenoy
- et al.
- 2005
- VMIC 2005
Molecular monolayers and films
- J.D. Swalen
- D.L. Allara
- et al.
- 2002
- Langmuir
Minimum emission current of liquid metal ion sources
- J.C. Beckman
- T.H.P. Chang
- et al.
- 1997
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Structure in thin and ultrathin spin-cast polymer films
- Curtis W. Frank
- V. Rao
- et al.
- 1996
- Science
Switching characteristics of submicron cobalt islands
- R.D. Gomez
- M.C. Shih
- et al.
- 1996
- Journal of Applied Physics
Energy spread in liquid metal ion sources at low currents
- J.C. Beckman
- T.H.P. Chang
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Role of residual casting solvent in dissolution behavior of poly (3-methyl-4-hydroxystyrene) films
- Veena Rao
- William D. Hinsberg
- et al.
- 1994
- Microlithography 1994
Principles and techniques of STM lithography
- Mark A. McCord
- Roger Fabian W. Pease
- 1993
- SPIE Advanced Optical Technologies 1993
The influence of residual casting solvent on the dissolution behavior of diazonaphthoquinone resists
- V. Rao
- W.D. Hinsberg
- et al.
- 1993
- Microlithography 1993