Publications

2 results for F.E. Turene

PtSi Contact Metallurgy using Sputtered Pt and Different Annealing Processes
- - H.-C.W. Huang
  - B. Cunningham
  - et al.
- 2019
- JES
Excimer laser as a source for thin Cu film deposition for use in electronic device fabrication
- - A. Sugerman
  - Bodil Braren
  - et al.
- 1993
- SPIE OE/LASE 1993