Investigation of Reactive-Ion-Etching-Related Fluorocarbon Film Deposition onto Silicon and a New Method for Surface Residue Removal
- G.S. Oehrlein
- J.G. Clabes
- et al.
- 2019
- JES
Paper
Publications
7 results for P. Spirito
Two silicon optical modulators realizable with a fully compatible bipolar process
- Giovanni Breglio
- Antonello Cutolo
- et al.
- 1998
- IEEE Journal on Selected Topics in Quantum Electronics
PaperSilicon electro-optic modulator based on a three terminal device integrated in a low-loss single-mode SOI waveguide
- Antonello Cutolo
- Mario Iodice
- et al.
- 1997
- Journal of Lightwave Technology
PaperRecombination Lifetime Profiling in Very Thin Si Epitaxial Layers Used for Bipolar VLSI
- Paolo Spirito
- S. Bellone
- et al.
- 1989
- IEEE Electron Device Letters
PaperELECTRICAL CHARACTERIZATION OF SILICON SURFACES EXPOSED TO RIE.
- C.M. Ransom
- P. Spirito
- 1986
- Symposium on Plasma Processing 1986
Conference paperElectrical characterization of polysilicon/monosilicon interfaces
- S. Bellone
- P. Spirito
- et al.
- 1987
- ESSDERC 1987
Conference paperSchottky diode analysis for evaluation of RIE effects on silicon surfaces
- P. Spirito
- C.M. Ransom
- et al.
- 1986
- Solid-State Electronics
Paper