Publications

5 results for Y.S. Chaug

Local structure investigation of the ion sputtered oxide substrates
- - Y.S. Chaug
  - Y.H. Kim
  - et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
X-ray photoelectron and infrared spectroscopy of microwave plasma etched polyimide surfaces
- - N.J. Chou
  - J. Paraszczak
  - et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Interaction of Ti with fused silica and sapphire during metallization
- - Y.S. Chaug
  - N.J. Chou
  - et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Adhesion of titanium thin film to oxide substrates
- - Y.H. Kim
  - Y.S. Chaug
  - et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Mechanism of microwave plasma etching of polyimides in O₂ and CF₄ gas mixtures
- - N.J. Chou
  - J. Parazsczak
  - et al.
- 1986
- Microelectronic Engineering