Polysilanes: Photochemistry and deep UV lithography
- R.D. Miller
- G.M. Wallraff
- et al.
- 2004
- Polymer Engineering & Science
Paper
Publications
3 results for Kenneth A. Klingensmith
Electronic Excitation in Poly(di-n-hexylsilane)
- Kenneth A. Klingensmith
- John W. Downing
- et al.
- 2002
- JACS
PaperPolysilanes: photochemistry and deep UV lithography
- R.D. Miller
- G.M. Wallraff
- et al.
- 1988
- SPE Regional Technical Conference 1988
Conference paper