PtSi Contact Metallurgy using Sputtered Pt and Different Annealing Processes
- H.-C.W. Huang
- B. Cunningham
- et al.
- 2019
- JES
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Effect of the sintering process on the formation and passivation of PtSi
- H.-C.W. Huang
- F.E. Turene
- et al.
- 1986
- JVSTA