Slope control of molybdenum lines etched with reactive ion etching
- Yue Kuo
- J.R. Crowe
- 1990
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Paper
Publications
5 results for J.R. Crowe
Factors affecting reactive ion etching of corning 7059 glass
- Yue Kuo
- J.R. Crowe
- 1989
- Proceedings of SPIE 1989
Conference paperReactive ion etching of a multicomponent glass substrate
- Yue Kuo
- J.R. Crowe
- 1989
- Proceedings of SPIE 1989
Conference paperProperties of hard tungsten films prepared by sputtering
- K.K. Shih
- D.A. Smith
- et al.
- 1988
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
PaperProperties of Cr-N films produced by reactive sputtering
- K.K. Shih
- D.B. Dove
- et al.
- 1986
- JVSTA
Paper