Examination of uncoated photoresist by the low-loss electron method in the scanning electron microscope
- Oliver C. Wells
- Ping-Chin Cheng
- 1987
- Journal of Applied Physics
Publications
2 results for P.C. Cheng
Soft X-ray contact microscopy
- P.C. Cheng
- R. Feder
- et al.
- 1986
- Nuclear Inst. and Methods in Physics Research, A