Publications

2 results for H.-O. Blom

Plasma etching of Hf-based high- k thin films. Part II. Ion-enhanced surface reaction mechanisms
- - Ryan M. Martin
  - Hans-Olof Blom
  - et al.
- 2009
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary Abstract: Resistivity-process relationships in TiSi₂ formed from Ti-Si reaction couples
- - H.-O. Blom
  - S. Berg
  - et al.
- 1985
- JVSTA