Mirror fabrication for full-wafer laser technology
- David J. Webb
- M. Benedict
- et al.
- 1991
- SPIE Optics, Electro-Optics, and Laser Applications in Science and Engineering 1991
Publications
7 results for H.P. Dietrich
In-situ CI 2 thermal etching of GaAs/AiGaAs for damage removal in a plasma etcher
- J.S. Lechaton
- P. Buchmann
- et al.
- 1991
- IEE/LEOS Summer Topical Meetings 1991
Full-Wafer Technology—a New Approach To Large-Scale Laser Fabrication and Integration
- Peter Vettiger
- Gian-Luca Bona
- et al.
- 1991
- IEEE JQE
Full wafer technology for semiconductor lasers
- P. Buchmann
- M. Benedict
- et al.
- 1990
- LEOS 1990
Full wafer processing and testing-the future of large scale laser fabrication
- P. Vettiger
- M. Benedict
- et al.
- 1990
- ISLC 1990
Chemically assisted ion beam etching process for high quality laser mirrors
- P. Buchmann
- H.P. Dietrich
- et al.
- 1989
- Microelectronic Engineering
Highly selective argon-oxygen ion beam etching process for Pb alloys
- D.F. Moore
- H.P. Dietrich
- et al.
- 1985
- JVSTA