Semiconductor dimensional metrology using the scanning electron microscope
- S. Utterback
- 1988
- Review of Progress in Quantitative Nondestructive Evaluation
Paper
Publications
4 results for S. Utterback
Infrared thermal particle detection physics
- S. Utterback
- R.L. Melcher
- 1986
- Journal of Applied Physics
PaperSCANNING ELECTRON MICROSCOPE STUDY OF PARTICLE/SUBSTRATE THERMAL CONTACT.
- S. Utterback
- F.H. Dacol
- et al.
- 1985
- Scanning Electron Microscopy
PaperThermal coupling of particulates to substrates
- S. Utterback
- F.H. Dacol
- et al.
- 1985
- Applied Physics Letters
Paper