XeCl laser controlled chemical etching of aluminum in chlorine gasG. KorenFahfu Hoet al.1986Applied Physics A Solids and Surfaces
LASER-ASSISTED CHEMICAL ETCHING OF ALUMINUM IN A CHLORINE ENVIRONMENT.Fahfu HoJ.J. Ritskoet al.1984CLEO 1984
PULSE-LENGTH STUDIES OF POLYMER ETCHING WITH EXCIMER LASERS: IN SEARCH OF TWO-PHOTON AND SATURATED ABSORPTIONS.C.S. GudemanJ.J. Donelonet al.1984CLEO 1984
Excimer laser etching of Al metal films in chlorine environmentsG. KorenFahfu Hoet al.1985Applied Physics Letters