Laser-assisted chemical etching of copper
- J.J. Ritsko
- Fahfu Ho
- et al.
- 1988
- Applied Physics Letters
Paper
Publications
5 results for Fahfu Ho
XeCl laser controlled chemical etching of aluminum in chlorine gas
- G. Koren
- Fahfu Ho
- et al.
- 1986
- Applied Physics A Solids and Surfaces
PaperPULSE-LENGTH STUDIES OF POLYMER ETCHING WITH EXCIMER LASERS: IN SEARCH OF TWO-PHOTON AND SATURATED ABSORPTIONS.
- C.S. Gudeman
- J.J. Donelon
- et al.
- 1984
- CLEO 1984
Conference paperLASER-ASSISTED CHEMICAL ETCHING OF ALUMINUM IN A CHLORINE ENVIRONMENT.
- Fahfu Ho
- J.J. Ritsko
- et al.
- 1984
- CLEO 1984
Conference paperExcimer laser etching of Al metal films in chlorine environments
- G. Koren
- Fahfu Ho
- et al.
- 1985
- Applied Physics Letters
Paper