Lithographic Processing of Polymers Using Plasma-Generated Electron Beams
- Lumin Li
- Jayaram Krishnaswamy
- et al.
- 1990
- IEEE Transactions on Plasma Science
Publications
2 results for Zeng-qi Yu
New lasers II
- P.F. Moulton
- W. Künzel
- et al.
- 1982
- Applied Physics B Photophysics and Laser Chemistry