Improved underlayers for acid amplified resists
- H.S. Sachdev
- R.W. Kwong
- et al.
- 1994
- Microelectronic Engineering
Publications
2 results for Harbans S. Sachdev
Characterization of plasma-deposited organosilicon thin films
- Krishna G. Sachdev
- Harbans S. Sachdev
- 1983
- Thin Solid Films